Factory Automation

AMHS (Automated Material Handling Solution)SOLUTIONS

Software Modules

MCS (Material Control System)

1. Main control system of AMHS
2. Adopted SECS/GEM (SEMI Standards) for semiconductor industry
3. Communicate with Host, ETS & AMHS Equipment
**SECS = SEMI Equipment Communications Standard
**GEM = Generic Equipment Model
**SEMI = Semiconductor Equipment Materials International

ETS (Equipment Tracking System)

1. Communicate with PLC and equipment that are not SECS/GEM compliance
2. Communicate with MCS via SECS/GEM

Hardware Modules

  • Conveyor
  • Lifter
  • Shutter
  • Rotator