AMHS (Automated Material Handling Solution)SOLUTIONS
Software Modules
MCS (Material Control System)
1. Main control system of AMHS
2. Adopted SECS/GEM (SEMI Standards) for semiconductor industry
3. Communicate with Host, ETS & AMHS Equipment
**SECS = SEMI Equipment Communications Standard
**GEM = Generic Equipment Model
**SEMI = Semiconductor Equipment Materials International
ETS (Equipment Tracking System)
1. Communicate with PLC and equipment that are not SECS/GEM compliance
2. Communicate with MCS via SECS/GEM
Hardware Modules
- Conveyor
- Lifter
- Shutter
- Rotator
